JPH01168853U - - Google Patents
Info
- Publication number
- JPH01168853U JPH01168853U JP6651088U JP6651088U JPH01168853U JP H01168853 U JPH01168853 U JP H01168853U JP 6651088 U JP6651088 U JP 6651088U JP 6651088 U JP6651088 U JP 6651088U JP H01168853 U JPH01168853 U JP H01168853U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- wiring pattern
- data
- thickness
- comparator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims 4
- 238000007689 inspection Methods 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6651088U JPH01168853U (en]) | 1988-05-20 | 1988-05-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6651088U JPH01168853U (en]) | 1988-05-20 | 1988-05-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01168853U true JPH01168853U (en]) | 1989-11-28 |
Family
ID=31291915
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6651088U Pending JPH01168853U (en]) | 1988-05-20 | 1988-05-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01168853U (en]) |
-
1988
- 1988-05-20 JP JP6651088U patent/JPH01168853U/ja active Pending
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